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Proceedings Paper

Extreme-ultraviolet source development: a comparison of different concepts
Author(s): Guido Schriever; Manfred Rahe; Ulrich Rebhan; Dirk Basting; Wojciech J. Walecki; Hans Lauth; Rainer Lebert; Klaus Bergmann; Dieter Hoffmann; Oliver Rosier; Willi Neff; Reinhart Poprawe; Roland A. Sauerbrey; H. Schwoerer; S. Duesterer; C. Ziener; Peter Viktor Nickles; H. Stiehl; Ingo Will; Wolfgang Sandner; Guenther A. Schmahl; Dietbert M. Rudolph
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Paper Abstract

We discuss the results of the studies of Z-pinch sources for photolithographic applications developed by Lambda Physik. We also report the results of fundamental investigations pursued by Fraunhofer-Institut fuer Lasertechnik. Friedrich- Schiller Universitat Jena, Max-Born Institut Berlin, and Gustav August Universitat Gottingen. The later efforts are supported by German government and steered by the industrial consortium led by Lambda Physik.

Paper Details

Date Published: 8 November 2000
PDF: 8 pages
Proc. SPIE 4146, Soft X-Ray and EUV Imaging Systems, (8 November 2000); doi: 10.1117/12.406662
Show Author Affiliations
Guido Schriever, Lambda Physik GmbH (Germany)
Manfred Rahe, Lambda Physik GmbH (Germany)
Ulrich Rebhan, Lambda Physik GmbH (Germany)
Dirk Basting, Lambda Physik GmbH (United States)
Wojciech J. Walecki, Lambda Physik (United States)
Hans Lauth, Jenoptik Laser, Optik, Systeme GmbH Jena (Germany)
Rainer Lebert, Fraunhofer-Institut fuer Lasertechnik (Germany)
Klaus Bergmann, Fraunhofer-Institut fuer Lasertechnik (Germany)
Dieter Hoffmann, Fraunhofer-Institut fuer Lasertechnik (Germany)
Oliver Rosier, Fraunhofer-Institut fuer Lasertechnik (Germany)
Willi Neff, Fraunhofer-Institut fuer Lasertechnik (Germany)
Reinhart Poprawe, Fraunhofer-Institut fuer Lasertechnik (Germany)
Roland A. Sauerbrey, Friedrich-Schiller-Univ. Jena (Germany)
H. Schwoerer, Friedrich-Schiller-Univ. Jena (Germany)
S. Duesterer, Friedrich-Schiller-Univ. Jena (Germany)
C. Ziener, Friedrich-Schiller-Univ. Jena (Germany)
Peter Viktor Nickles, Max-Born-Institut (Germany)
H. Stiehl, Max-Born-Institut (Germany)
Ingo Will, Max-Born-Institut (Germany)
Wolfgang Sandner, Max-Born-Institut (Germany)
Guenther A. Schmahl, Georg-August-Univ. Goettingen (Germany)
Dietbert M. Rudolph, Georg-August-Univ. Goettingen (Germany)

Published in SPIE Proceedings Vol. 4146:
Soft X-Ray and EUV Imaging Systems
Winfried M. Kaiser; Richard H. Stulen, Editor(s)

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