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Proceedings Paper

Fabrication and characterization of metalorganic-derived thin barium titanate ferroelectric films on silicon and magnesium oxide substrates
Author(s): D. Hernandez Cruz; P. K. Choudhury; Bendida Sahouli; Amir Tork; Roger A. Lessard
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Paper Abstract

The characteristics of thin BaTiO3 films deposited on Si and MgO substrates by employing the metal-organic deposition technique are studied. In the experiment, the commercial barium 2-ethyihexanoate and the synthesized titanium dimethoxy dineodecanoate are used as precursors for the formation of BaTiO3 films. The film characterization is performed by X-ray diffraction and the scanning electron microscopy. The obtained results show that the prepared films have nearly good stoichiometry and the obtained tetragonal structure properties of BaTiO3 indicates that these may fmd some possible optical/electrical applications in the field ofintegrated optics technology.

Paper Details

Date Published: 15 December 2000
PDF: 5 pages
Proc. SPIE 4087, Applications of Photonic Technology 4, (15 December 2000); doi: 10.1117/12.406461
Show Author Affiliations
D. Hernandez Cruz, Univ. Laval (Canada)
P. K. Choudhury, Univ. Laval (Canada)
Bendida Sahouli, Univ. Laval (Canada)
Amir Tork, Univ. Laval (Canada)
Roger A. Lessard, Univ. Laval (Canada)


Published in SPIE Proceedings Vol. 4087:
Applications of Photonic Technology 4
Roger A. Lessard; George A. Lampropoulos, Editor(s)

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