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Proceedings Paper

Effect of stress on silicon oxynitride optical waveguides
Author(s): Yitao Sun; K. A. McGreer; James N. Broughton
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Paper Abstract

An integrated optical demultiplexer is an ideal device for the measurement of the effect of strain (or, equivalently, stress) on birefringence. We fabricated optical demultiplexers from silicon oxynitride optical waveguides and measured the strain dependence of the passband wavelengths. From the shift in the passband wavelength, we determined the strain dependence of the effective index for the silicon oxynitride waveguide.

Paper Details

Date Published: 15 December 2000
PDF: 6 pages
Proc. SPIE 4087, Applications of Photonic Technology 4, (15 December 2000); doi: 10.1117/12.406401
Show Author Affiliations
Yitao Sun, Univ. of Manitoba (Canada)
K. A. McGreer, Univ. of Manitoba (Canada)
James N. Broughton, Alberta Microelectronics Corp. (Canada)


Published in SPIE Proceedings Vol. 4087:
Applications of Photonic Technology 4
Roger A. Lessard; George A. Lampropoulos, Editor(s)

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