Proceedings PaperTriangulation-based sensor for noncontact micro- and nanotopographic surface inspection
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New developments of the main sensor of the MICROTOP' family of microtopographers are presented. Increased versatility, reliability, with larger measuring range, better accuracy and resolution that now can be driven down to the nanometer range, were achieved in the new MICROTOP.06.MFC. Optical triangulation with normal and specular observation under oblique incidence and angle resolved scattering are combined to give reliable roughness and full microtopographic inspection of a large range of surfaces and roughness regimes.