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Proceedings Paper

Accurate multilayer period determination with laser plasma water-window reflectometer
Author(s): Goeran A. Johansson; Magnus Berglund; Fredrik Eriksson; Jens Birch; Hans M. Hertz
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Paper Abstract

This paper describes a new method for improved determination of multilayer period using a soft x-ray reflectometer based on a line-emitting high-brightness water-window liquid-jet laser- plasma source. The use of line emission with well-known wavelengths allows accurate measurements of multilayer period without source monochromatization and calibration. By using a new multi-line data analysis procedure the multilayer period of W/B4C mirrors can be determined with an accuracy of 0.001 nm.

Paper Details

Date Published: 2 November 2000
PDF: 4 pages
Proc. SPIE 4144, Advances in Laboratory-based X-Ray Sources and Optics, (2 November 2000); doi: 10.1117/12.405907
Show Author Affiliations
Goeran A. Johansson, Royal Institute of Technology (Sweden)
Magnus Berglund, Royal Institute of Technology (Sweden)
Fredrik Eriksson, Linkoeping Univ. (Sweden)
Jens Birch, Linkoeping Univ. (Sweden)
Hans M. Hertz, Royal Institute of Technology (Sweden)


Published in SPIE Proceedings Vol. 4144:
Advances in Laboratory-based X-Ray Sources and Optics
Carolyn A. MacDonald; Ali M. Khounsary, Editor(s)

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