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Proceedings Paper

Microfocus soft x-ray source generated by a compact high-power laser plasma
Author(s): I. C. Edmond Turcu; Harry Rieger; Yuli Vladimirsky; Robert K. Grygier; Michael F. Powers; Joe R. Naunguyan; S. M. Campeau; G. French; Richard Alan Forber; Richard M. Foster
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Paper Abstract

A high power picosecond soft x-ray source is generated by a compact, modular, diode pumped solid state laser BriteLightTM. Three x-ray source version are constructed from laser modules with increasing power. The power of the x-ray sources is tailored to potential applications. The building block of such a modular system is a 3 Watt x-ray power source with 1.1 keV x-ray photon energy. The laser system is very compact with dimensions of 4 ft X 3 ft X 1 fit. It is composed of a laser master oscillator, pre-amplifier and one power amplifier. A four laser amplifier system was also constructed in order to generate 12 W of x-rays for application to x-ray lithography.

Paper Details

Date Published: 2 November 2000
PDF: 15 pages
Proc. SPIE 4144, Advances in Laboratory-based X-Ray Sources and Optics, (2 November 2000); doi: 10.1117/12.405882
Show Author Affiliations
I. C. Edmond Turcu, JMAR Technologies, Inc. (United States)
Harry Rieger, JMAR Technologies, Inc. (United States)
Yuli Vladimirsky, JMAR Technologies, Inc. (United States)
Robert K. Grygier, JMAR Technologies, Inc. (United States)
Michael F. Powers, JMAR Technologies, Inc. (United States)
Joe R. Naunguyan, JMAR Technologies, Inc. (United States)
S. M. Campeau, JMAR Technologies, Inc. (United States)
G. French, JMAR Technologies, Inc. (United States)
Richard Alan Forber, JMAR Technologies, Inc. (United States)
Richard M. Foster, JMAR Technologies, Inc. (United States)


Published in SPIE Proceedings Vol. 4144:
Advances in Laboratory-based X-Ray Sources and Optics
Carolyn A. MacDonald; Ali M. Khounsary, Editor(s)

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