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Proceedings Paper

Surface and defect analysis using spatial light modulators
Author(s): Hans J. Tiziani; Tobias Haist
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Paper Abstract

Current trends in optical defect detection and surface analysis using spatial light modulators are discussed. Examples for microscopic as well as macroscopic measurements in two and three dimensions are shown. Results for adaptive fringe projection in combination with moire, for adaptive illumination for two-dimensional image processing, and for the detection of defects in periodic media will be presented. We also report on improved correlation methods for position detection.

Paper Details

Date Published: 2 November 2000
PDF: 10 pages
Proc. SPIE 4113, Algorithms and Systems for Optical Information Processing IV, (2 November 2000); doi: 10.1117/12.405865
Show Author Affiliations
Hans J. Tiziani, Univ. Stuttgart (Germany)
Tobias Haist, Univ. Stuttgart (Germany)


Published in SPIE Proceedings Vol. 4113:
Algorithms and Systems for Optical Information Processing IV
Bahram Javidi; Demetri Psaltis, Editor(s)

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