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Proceedings Paper

Evaluating optical and supersmooth surface using AFM in optical maunfacturing technology
Author(s): Jianbai Li; Shaorong Xiao; Xiaoyun Li; Aihan Ying; Anqing Zhao
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Paper Abstract

In this paper, a testing method for optical polished surface in level instrumentation and supersmooth surface in soft x- ray system using Atomic Force Microscope (AFM) is presented, and some testing results reached to nanometer RMS are listed. In the paper it is indicated that, different size of polished platforms are formed as difference of optical polished method and period. Important applications of AFM testing method for improving optical polished technology and obtaining supersmooth surface are introduced in the paper.

Paper Details

Date Published: 2 November 2000
PDF: 6 pages
Proc. SPIE 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, (2 November 2000); doi: 10.1117/12.405836
Show Author Affiliations
Jianbai Li, Jiangxi Academy of Sciences (China)
Shaorong Xiao, Nanjing Meteorology Institute (China)
Xiaoyun Li, Jiangxi Academy of Sciences (China)
Aihan Ying, Jiangxi Academy of Sciences (China)
Anqing Zhao, Jiangxi Academy of Sciences (China)


Published in SPIE Proceedings Vol. 4099:
Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries
Ghanim A. Al-Jumaily; Angela Duparre; Bhanwar Singh, Editor(s)

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