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Proceedings Paper

Present and future interference microscope systems for magnetic head metrology
Author(s): Paul J. Caber; Artur G. Olszak; Chip Ragan; David J. Aziz
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Paper Abstract

Interference microscopy is the primary tool used in the Data Storage industry for air bearing surface (ABS) and pole tip recession (PTR) measurements. ABS parameters include crown, camber and twist (CCT), and affect the behavior of the magnetic head as it flies above the spinning disk. PTR parameters describe the relative height of the writing poles and reading shield. The roadmap for several types of measurements will be discussed in this paper.

Paper Details

Date Published: 2 November 2000
PDF: 10 pages
Proc. SPIE 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, (2 November 2000); doi: 10.1117/12.405817
Show Author Affiliations
Paul J. Caber, Veeco Metrology Group (United States)
Artur G. Olszak, Veeco Metrology Group (United States)
Chip Ragan, Veeco Metrology Group (United States)
David J. Aziz, Axon Instruments (United States)


Published in SPIE Proceedings Vol. 4099:
Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries
Ghanim A. Al-Jumaily; Angela Duparre; Bhanwar Singh, Editor(s)

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