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Proceedings Paper

Optical testing of long cylindrical lenses by means of scanning deflectometry
Author(s): Willem D. van Amstel; Peter F.A. van de Goor; Jef L. Horijon; Peter G. J. M. Nuyens
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Paper Abstract

We present an extremely simple and powerful test set-up for measuring the position and the focal line straightness (lateral) and flatness (longitudinal) of cylindrical lenses, in particular of very long cylindrical lenses. Measurement results are presented for 330 mm and 650 mm long plano- convex cylindrical lenses with a focal length f approximately equals 48 mm, showing that a (lateral) straightness measurement accuracy of about +/- 1 micrometers is achieved easily with a set-up using not much more than a laser, a simple beam deflector from a barcode scanner, a PSD (position-sensitive photo diode) with associated electronics and a translation stage. A fully automated cylindrical lens test set-up version, using a PC for control and data processing will be explained. For the 330 mm long cylindrical lenses, the lateral straightness showed better than between 3 and 10 micrometers (peak to peak) and the longitudinal flatness between 20 and 80 micrometers (peak to peak) without corrective bending. It will be demonstrated that the aberration coefficients, as measured by this physical ray tracing approach, are in accordance with the results from numerical simulation by means of a commercially available ray-tracing program.

Paper Details

Date Published: 2 November 2000
PDF: 11 pages
Proc. SPIE 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, (2 November 2000); doi: 10.1117/12.405813
Show Author Affiliations
Willem D. van Amstel, Philips Ctr. for Industrial Technology (Netherlands)
Peter F.A. van de Goor, Philips Ctr. for Industrial Technology (Netherlands)
Jef L. Horijon, Philips Ctr. for Industrial Technology (Netherlands)
Peter G. J. M. Nuyens, Philips Ctr. for Industrial Technology (Netherlands)


Published in SPIE Proceedings Vol. 4099:
Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries
Ghanim A. Al-Jumaily; Angela Duparre; Bhanwar Singh, Editor(s)

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