Share Email Print
cover

Proceedings Paper

Thermomechanical mechanisms of laser cleaning
Author(s): Vadim P. Veiko; Elena A. Shakhno; Sergey V. Nikolaev
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The physical mechanisms of dry and steam laser cleaning of the surface are investigated theoretically. At dry laser cleaning particles are removed from the surface due to inertial force that caused by particles and/or substrate thermal expansion by light absorption and thermal conduction. The condition of complete particle removal, when it does not return to the substrate, is defined. The considered physical mechanism of dry laser cleaning is propagated to multipulse regime. The physical mechanisms of steam laser cleaning are proposed to be caused by liquid layer vaporization near the particle surface due to substrate and/or particle light absorption and non-uniform action of vapor pressure to the particles. The evaluated thresholds of dry and steam laser cleaning are in a good agreement with known experimental data.

Paper Details

Date Published: 6 November 2000
PDF: 4 pages
Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405745
Show Author Affiliations
Vadim P. Veiko, St. Petersburg Institute of Fine Mechanics and Optics (Russia)
Elena A. Shakhno, St. Petersburg Institute of Fine Mechanics and Optics (Russia)
Sergey V. Nikolaev, St. Petersburg Institute of Fine Mechanics and Optics (Russia)


Published in SPIE Proceedings Vol. 4088:
First International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Koji Sugioka; Thomas W. Sigmon, Editor(s)

© SPIE. Terms of Use
Back to Top