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Proceedings Paper

Etching characteristics of the PDP barrier rib pastes by focused Ar+ laser and Nd:YAG laser
Author(s): MinYoung Ahn; KyoungCheol Lee; Hong Kyu Lee; Cheon Lee
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Paper Abstract

The paste dried and hardened on glass substrate for fabrication of the PDP (Plasma Display Panel) barrier rib was selectively etched using focused Ar+ laser ((lambda) =532 nm), the threshold laser fluence was about 6.5 mJ/cm2 for the barrier rib samples softened at 120 degree(s)C. The thickness of 180 (mu) of the sample was completely removed without any damages on the glass substrate by laser fluence of 19.5 J/cm2. In order to increase the etch rate of the barrier rib materials, samples were heated on a hot plate during the laser irradiation. The etch rate at the hot plate temperature of 200 degree(s)C was roughly 4.2 times faster than that of room temperature.

Paper Details

Date Published: 6 November 2000
PDF: 4 pages
Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405744
Show Author Affiliations
MinYoung Ahn, Inha Univ. (South Korea)
KyoungCheol Lee, Inha Univ. (South Korea)
Hong Kyu Lee, Inha Univ. (South Korea)
Cheon Lee, Inha Univ. (South Korea)


Published in SPIE Proceedings Vol. 4088:
First International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Koji Sugioka; Thomas W. Sigmon, Editor(s)

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