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Proceedings Paper

Matrix-assisted laser transfer of electronic materials for direct-write applications
Author(s): Raymond C. Y. Auyeung; H. D. Wu; R. Modi; Alberto Pique; J. M. Fitz-Gerald; Henry D. Young; Samuel Lakeou; Russell Chung; Douglas B. Chrisey
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Paper Abstract

A novel laser-based direct-write technique, called Matrix Assisted Pulsed Laser Evaporation Direct Write (MAPLE-DW), has been developed for the rapid prototyping of electronic devices. MAPLE-DW is a maskless deposition process operating under ambient conditions which allows for the rapid fabrication of complex patterns of electronic materials. The technique utilizes a laser transparent substrate with one side coated with a matrix of the materials of interest mixed with an organic vehicle. The laser is focused through the transparent substrate onto the matrix coating which aids in transferring the materials of interest to an acceptor substrate placed parallel to the matrix surface. With MAPLE-DW, diverse materials including metals, dielectrics, ferroelectrics, ferrites and polymers have been transferred onto various acceptor substrates. The capability for laser-modifying the surface of the acceptor substance and laser-post-processing the transferred material has been demonstrated as well. This simple yet powerful technique has been used to fabricate passive thin film electronic components such as resistors, capacitors and metal lines with good functional properties. An overview of these key results along with a discussion of their materials and properties characterization will be presented.

Paper Details

Date Published: 6 November 2000
PDF: 4 pages
Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405735
Show Author Affiliations
Raymond C. Y. Auyeung, SFA Inc. (United States)
H. D. Wu, SFA Inc. (United States)
R. Modi, George Washington Univ. (United States)
Alberto Pique, Naval Research Lab. (United States)
J. M. Fitz-Gerald, Naval Research Lab. (United States)
Henry D. Young, SFA Inc. (United States)
Samuel Lakeou, SFA Inc. (United States)
Russell Chung, Geo-Centers, Inc. (United States)
Douglas B. Chrisey, Naval Research Lab. (United States)


Published in SPIE Proceedings Vol. 4088:
First International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Koji Sugioka; Thomas W. Sigmon, Editor(s)

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