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Proceedings Paper

Advanced laser microfabrication of photonic components
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Paper Abstract

The powerful transition from electronic to photonic systems in today's Internet-driven communication industry is driving the development of processes to miniaturize and integrate optical components. New processing and packaging technologies are now required that can precisely shape and assemble transparent optical components to sub-wavelength accuracy. Laser microfabrication technology is beginning to play a role here. Our groups are exploring two extremes in laser technology- ultrafast lasers and very short wavelength F2 lasers- to microstructure optical surfaces and to profile refractive-index structures inside transparent glasses. In this paper, we compare photosensitivity responses, spatial resolution, and processing windows for the deep-ultraviolet and ultrafast laser approaches, and discuss prospects for laser printing and trimming of optical waveguide components and circuits.

Paper Details

Date Published: 6 November 2000
PDF: 6 pages
Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405727
Show Author Affiliations
Peter R. Herman, Univ. of Toronto (Canada)
Kevin P. Chen, Univ. of Toronto (Canada)
Paul B. Corkum, Steacie Institute for Molecular Sciences (Canada)
Andrei Naumov, Steacie Institute for Molecular Sciences (Canada)
Sandy Ng, Univ. of Toronto (Canada)
Jie Zhang, Univ. of Toronto (Canada)

Published in SPIE Proceedings Vol. 4088:
First International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Koji Sugioka; Thomas W. Sigmon, Editor(s)

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