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Proceedings Paper

High-precision microcutting of ceramics with short-pulsed solid state lasers
Author(s): Joachim Radtke; Tobias Abeln; Michael Weikert; Friedrich Dausinger
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Paper Abstract

This contribution will present results for high-precision cutting of technical ceramics with short-pulsed solid-state lasers in fundamental and frequency-doubled wavelength. On the basis of ample experiments, a surprising absorption behavior of some ceramics in the case of irradiation with high intensity will be discussed. Furthermore, the influence of wavelength and process gas on cutting speed and quality is demonstrated. The investigations resulted in a process strategy with multiple passing over of the kerf suited for remarkably improving process velocity and quality. Finally, structures applicable for nozzles and spinnerets are shown.

Paper Details

Date Published: 6 November 2000
PDF: 4 pages
Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405713
Show Author Affiliations
Joachim Radtke, Univ. of Stuttgart (Germany)
Tobias Abeln, Univ. of Stuttgart (Germany)
Michael Weikert, Univ. of Stuttgart (Germany)
Friedrich Dausinger, Univ. of Stuttgart (Germany)

Published in SPIE Proceedings Vol. 4088:
First International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Koji Sugioka; Thomas W. Sigmon, Editor(s)

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