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Proceedings Paper

Micromachining with ultrafast lasers
Author(s): Kazuhiko Shihoyama; A. Furukawa; Philippe Bado; Ali A. Said
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Paper Abstract

Conventional laser machining is based on continuous-wave or long-pulse lasers. With these lasers, thermal diffusion limits the accuracy and the reproducibility of the machining process. Laser-matter interaction is fundamentally different in the ultrafast (femtosecond) regime. This discovery has opened the way for generalized fine laser micromachining.

Paper Details

Date Published: 6 November 2000
PDF: 4 pages
Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405701
Show Author Affiliations
Kazuhiko Shihoyama, Hoya-Continuum (Japan)
A. Furukawa, Hoya-Continuum (Japan)
Philippe Bado, Clark-MXR, Inc. (United States)
Ali A. Said, Clark-MXR, Inc. (United States)

Published in SPIE Proceedings Vol. 4088:
First International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Koji Sugioka; Thomas W. Sigmon, Editor(s)

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