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Proceedings Paper

Excimer laser microfabrication and micromachining
Author(s): Malcolm C. Gower
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Paper Abstract

Reports in 1982 of polymers ablated and etched by excimer laser radiation mark the founding of laser microfabrication and micromachining as technologies that in the intervening period has matured into a manufacturing process used by a diverse range of industries. This paper describes some of these industrial applications.

Paper Details

Date Published: 6 November 2000
PDF: 8 pages
Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405698
Show Author Affiliations
Malcolm C. Gower, Exitech Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 4088:
First International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Koji Sugioka; Thomas W. Sigmon, Editor(s)

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