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Proceedings Paper

Molecular dynamics simulation of ablation process with ultrashort-pulsed laser
Author(s): Etsuji Ohmura; Ichirou Fukumoto; Isamu Miyamoto
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Paper Abstract

Ultra-Short pulsed lasers are highly useful tools in the field of microfabrication. In microfabrication, the laser pulse usually is very short in the pico-second or subpico- second range: therefore, it is very difficult to observe the transient material processing phenomena experimentally. Over the years, the authors have conducted molecular dynamics (MD) simulation to study the ablation process with ultra-short pulsed laser irradiation. The MD method has been modified to simulate the laser ablation of metals by updating heat conduction effect by free electrons at each calculation time step. In this paper, a review of the modified MD simulations on ablation and shock phenomena for metal with pico-second laser irradiation is presented.

Paper Details

Date Published: 6 November 2000
PDF: 6 pages
Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405692
Show Author Affiliations
Etsuji Ohmura, Osaka Univ. (Japan)
Ichirou Fukumoto, RIKEN--The Institute of Physical and Chemical Research (Japan)
Isamu Miyamoto, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 4088:
First International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Koji Sugioka; Thomas W. Sigmon, Editor(s)

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