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Proceedings Paper

Laser microprocessing unit and its application
Author(s): Kenshi Fukumitsu; Tomonori Oie
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Paper Abstract

This is the report for compact laser micro processing unit excimer laser employed featuring a very fine process with high accuracy. This unit consists of objective lens, of which magnification is 10 to 80, used for both processing and observation. It makes possible high energy density resulting 0.5micrometers resolution at 248nm, accurate positioning and compact size. Applications 1) Removing upper metal layer of LSI in order to inspect pattern of the bottom layer. 2) Creating fine geometrical pattern on PET fiber cloth in order to apply new function such as better dyeing and adhesiveness. 3) Creating 100micrometers dia. Hole to artificial blood vessel made of polyurethane tube with 2mm inner dia. In order to have similar mechanical property to real blood vessel.

Paper Details

Date Published: 6 November 2000
PDF: 4 pages
Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405685
Show Author Affiliations
Kenshi Fukumitsu, Hamamatsu Photonics K.K. (Japan)
Tomonori Oie, Hamamatsu Photonics K.K. (Japan)


Published in SPIE Proceedings Vol. 4088:
First International Symposium on Laser Precision Microfabrication

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