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Proceedings Paper

Development of the enhanced concurrent in-line inspection system for CO2 laser drilling machine
Author(s): Hideaki Nagatoshi; Kazuhide Isaji; Tsutomu Sugiyama; Hidehiko Karasaki; Makoto Kato
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Paper Abstract

The performance of the concurrent in-line inspection system in CO2 laser drilling process has improved by the defect pattern estimation algorithm. The optical detection principle of the system is based on the relationship between the reflected laser intensity from the bottom copper foil in via-hole and the area size of the exposed copper surface. The principle and the advantage of the enhance concurrent inspection system was described. Using the improved concurrent inspection system, the etched hole diameter and defect of PWB can be examined. This function has a capability to substitute AOI function. As a result, reliability and throughput in PWB drilling process has been improved.

Paper Details

Date Published: 6 November 2000
PDF: 4 pages
Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405682
Show Author Affiliations
Hideaki Nagatoshi, Matsushita Industrial Equipment Co., Ltd. (Japan)
Kazuhide Isaji, Matsushita Industrial Equipment Co., Ltd. (Japan)
Tsutomu Sugiyama, Matsushita Industrial Equipment Co., Ltd. (Japan)
Hidehiko Karasaki, Matsushita Industrial Equipment Co., Ltd. (Japan)
Makoto Kato, Matsushita Electric Industrial Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 4088:
First International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Koji Sugioka; Thomas W. Sigmon, Editor(s)

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