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Proceedings Paper

Theoretical basis for including small as well as large deflections of quadratic membrane structures in one behavioral model
Author(s): Dagmar Peters; Hilmar Bolte; Claudia Marschner; Sven Rehfuss; Rainer Laur
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Paper Abstract

Membrane structures are one of the most common elements in microsystems. In order to be able to perform system simulations, behavioral models of their bending lines have to be developed. These models may also be used as a basis for parameter extractions which is a crucial task in the development of microsystems. But parameter extractions can only be performed, if the models used include all of the most important physical effects. Hence, the physical basis of these models has to be very profound.

Paper Details

Date Published: 24 October 2000
PDF: 11 pages
Proc. SPIE 4228, Design, Modeling, and Simulation in Microelectronics, (24 October 2000); doi: 10.1117/12.405438
Show Author Affiliations
Dagmar Peters, Univ. of Bremen (Germany)
Hilmar Bolte, Univ. of Bremen (Germany)
Claudia Marschner, Univ. of Bremen (Germany)
Sven Rehfuss, Univ. of Bremen (Germany)
Rainer Laur, Univ. of Bremen (Germany)

Published in SPIE Proceedings Vol. 4228:
Design, Modeling, and Simulation in Microelectronics
Bernard Courtois; Serge N. Demidenko; Lee Y. Lau, Editor(s)

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