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Proceedings Paper

Geometry optimization of the interdigitated metal-semiconductor-metal photodiode structures
Author(s): Stanislav V. Averine; Yuen Chuen Chan; Yee Loy Lam
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Paper Abstract

The optimum geometry of the interdigital Metal- Semiconductor-Metal photodetector (MSM-PD) is discussed. From the calculated MSM-PD capacitance and transit time of optically generated carriers, the response time is evaluated and analyzed. We propose a simple design rule for achieving better high-speed response of the MSM-detector. The optimum interelectrode spacing for interdigitized MSM-PD has been established. The potentialities of different semiconductor materials for high-speed MSM-detectors are examined.

Paper Details

Date Published: 24 October 2000
PDF: 7 pages
Proc. SPIE 4228, Design, Modeling, and Simulation in Microelectronics, (24 October 2000); doi: 10.1117/12.405430
Show Author Affiliations
Stanislav V. Averine, Nanyang Technological Univ. (Singapore)
Yuen Chuen Chan, Nanyang Technological Univ. (Singapore)
Yee Loy Lam, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 4228:
Design, Modeling, and Simulation in Microelectronics
Bernard Courtois; Serge N. Demidenko; Lee Y. Lau, Editor(s)

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