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Proceedings Paper

Influence of high-substrate-bias voltage on the characteristics of DLC coatings
Author(s): Sheeja Divakaran; Beng Kang Tay; Shu Ping Lau
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Paper Abstract

Adhesive strength is one of the most important properties of any coating, and which can be improved by preparing an interface layer with increased ion energy i.e., by applying high substrate bias voltage. However, the films prepared under high substrate bias may have inferior qualities compared to the films that are prepared without any substrate bias. Hence, an investigation has been carried out to study the effect of high substrate bias voltages on the morphological, microstructure, mechanical and tribological properties of diamond-like carbon films. To identify the distinctive effect of the substrate bias, the films are prepared by a single step process with different substrate bias voltages.

Paper Details

Date Published: 24 October 2000
PDF: 6 pages
Proc. SPIE 4227, Advanced Microelectronic Processing Techniques, (24 October 2000); doi: 10.1117/12.405384
Show Author Affiliations
Sheeja Divakaran, Nanyang Technological Univ. (Singapore)
Beng Kang Tay, Nanyang Technological Univ. (Singapore)
Shu Ping Lau, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 4227:
Advanced Microelectronic Processing Techniques
H. Barry Harrison; Andrew Thye Shen Wee; Subhash Gupta, Editor(s)

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