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Proceedings Paper

VCSEL-based MOEMS architectures: from nanofabrication to environmental sensing ?
Author(s): Christophe Gorecki
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Paper Abstract

We present an original MOEMS architecture that combines the optical feedback properties of a VCSEL cavity with the nanometer- scale resolution of a GaAs micromachined tip. First, we investigate the effects of external optical feedback on the threshold and spectral characteristics of VCSELs. Second, theoretical analysis and experimental evidence demonstrate the practicability of VCSEL feedback as a principle of optical detection for SNOM microscopy. Finally, we propose a compact architecture of a SNOM sensor with a microtip integrated beneath the VCSEL, report the preliminary results of fabrication of the device, and discuss the opportunity of such architecture in space applications.

Paper Details

Date Published: 26 October 2000
PDF: 9 pages
Proc. SPIE 4134, Photonics for Space Environments VII, (26 October 2000); doi: 10.1117/12.405341
Show Author Affiliations
Christophe Gorecki, Univ. de Franche-Comte (France)

Published in SPIE Proceedings Vol. 4134:
Photonics for Space Environments VII
Edward W. Taylor, Editor(s)

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