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Proceedings Paper

MEMS technology at NASA's Jet Propulsion Laboratory
Author(s): Thomas George; Sam Young Bae; Indrani Chakraborty; Hillary Cherry; Christopher Evans; Beverley Eyre; Amanda A. Green; Allan Hui; Kevin King; H. Lynn Kim; Russell A. Lawton; Gisela Lin; Colleen Marrese; Juergen Mueller; Judith A. Podosek; Kirill Shcheglov; Tony K. Tang; Thomas R. VanZandt; Stephen E. Vargo; Joanne Wellman; Victor White; Dean V. Wiberg; Eui-Hyeok Yang
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Paper Abstract

The MEMS Technology Group is part of the Microdevices Laboratory (MDL) at the Jet Propulsion Laboratory (JPL). The group pursues the development of a wide range of advanced MEMS technologies that are primarily applicable to NASA's robotic as well as manned exploration missions. Thus these technologies are ideally suited for the demanding requirements of space missions namely, low mass, low power consumption and high reliability, without significant loss of capability. End-to-end development of these technologies is conducted at the MDL, a 38,000 sq. ft. facility with approximately 5500 sq. ft. each of cleanroom (class 10 - 100,000) and characterization laboratory space. MDL facilities include computer design and simulation tools, optical and electron-beam lithography, thin film deposition equipment, dry and wet etching facilities including Deep Reactive Ion Etching, device assembly and testing facilities. Following the fabrication of the device prototypes, reliability testing of these devices is conducted at the state-of-the-art Failure Analysis Laboratory at JPL.

Paper Details

Date Published: 26 October 2000
PDF: 9 pages
Proc. SPIE 4134, Photonics for Space Environments VII, (26 October 2000); doi: 10.1117/12.405340
Show Author Affiliations
Thomas George, Jet Propulsion Lab. (United States)
Sam Young Bae, Jet Propulsion Lab. (United States)
Indrani Chakraborty, Jet Propulsion Lab. (United States)
Hillary Cherry, Jet Propulsion Lab. (United States)
Christopher Evans, Jet Propulsion Lab. (United States)
Beverley Eyre, Jet Propulsion Lab. (United States)
Amanda A. Green, Jet Propulsion Lab. (United States)
Allan Hui, Jet Propulsion Lab. (United States)
Kevin King, Jet Propulsion Lab. (United States)
H. Lynn Kim, Jet Propulsion Lab. (United States)
Russell A. Lawton, Jet Propulsion Lab. (United States)
Gisela Lin, Jet Propulsion Lab. (United States)
Colleen Marrese, Jet Propulsion Lab. (United States)
Juergen Mueller, Jet Propulsion Lab. (United States)
Judith A. Podosek, Jet Propulsion Lab. (United States)
Kirill Shcheglov, Jet Propulsion Lab. (United States)
Tony K. Tang, Jet Propulsion Lab. (United States)
Thomas R. VanZandt, Jet Propulsion Lab. (United States)
Stephen E. Vargo, Jet Propulsion Lab. (United States)
Joanne Wellman, Jet Propulsion Lab. (United States)
Victor White, Jet Propulsion Lab. (United States)
Dean V. Wiberg, Jet Propulsion Lab. (United States)
Eui-Hyeok Yang, Jet Propulsion Lab. (United States)


Published in SPIE Proceedings Vol. 4134:
Photonics for Space Environments VII
Edward W. Taylor, Editor(s)

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