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Proceedings Paper

MEMS incandescent light source
Author(s): Meg L. Tuma; Kevin King; H. Lynn Kim; Richard Hansler; Eric W. Jones; Thomas George
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Paper Abstract

A MEMS-based, low-power, incandescent light source is being developed. This light source is fabricated using three bonded chips. The bottom chip consists of a reflector on Silicon, the middle chip contains a Tungsten filament bonded to Silicon and the top layer is a transparent window. A 25-micrometers -thick spiral filament is fabricated in Tungsten using lithography and wet- etching. A proof-of-concept device has been fabricated and tested in a vacuum chamber. Results indicate that the filament is electrically heated to approximately 2650 K. The power required to drive the proof-of-concept spiral filament to incandescence is 1.25 W. The emitted optical power is expected to be approximately 1.0 W with the spectral peak at 1.1 micrometers . The micromachining techniques used to fabricate this light source can be applied to other MEMS devices.

Paper Details

Date Published: 26 October 2000
PDF: 8 pages
Proc. SPIE 4134, Photonics for Space Environments VII, (26 October 2000); doi: 10.1117/12.405338
Show Author Affiliations
Meg L. Tuma, NASA Glenn Research Ctr. (United States)
Kevin King, Jet Propulsion Lab. (United States)
H. Lynn Kim, Jet Propulsion Lab. (United States)
Richard Hansler, Lighting Innovations Institute (United States)
Eric W. Jones, Jet Propulsion Lab. (United States)
Thomas George, Jet Propulsion Lab. (United States)


Published in SPIE Proceedings Vol. 4134:
Photonics for Space Environments VII
Edward W. Taylor, Editor(s)

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