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Proceedings Paper

Straightness measurement of a moving table by using laser beams
Author(s): Koji Tenjimbayashi
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Paper Abstract

A new method to measure the straightness of a moving table by using a laser beams is proposed. The straightness of a moving table consists of three rotation angle errors and two parallel displacement errors. The former error components are measured by two sets of parallel mirrors and the latter by a corner-cube mirror.

Paper Details

Date Published: 24 October 2000
PDF: 11 pages
Proc. SPIE 4093, Current Developments in Lens Design and Optical Systems Engineering, (24 October 2000); doi: 10.1117/12.405228
Show Author Affiliations
Koji Tenjimbayashi, Mechanical Engineering Lab./AIST (Japan)


Published in SPIE Proceedings Vol. 4093:
Current Developments in Lens Design and Optical Systems Engineering
Robert E. Fischer; Robert E. Fischer; R. Barry Johnson; Warren J. Smith; Warren J. Smith; William H. Swantner, Editor(s)

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