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Proceedings Paper

Dynamic characteristics measurement system for optical scanning micromirror
Author(s): J.C. Chiou; Yu-Chen Lin; Yi-Cheng Chang
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Paper Abstract

This paper describes the development of a novel, flexible, with appropriate accuracy dynamic characteristics measurement system for optical scanning micromirror. With the system, we can measure dynamic behavior such as transient response, scan speed, scan angle, scan repeatability, and scan non-linearity of the canning micromirror devices. Moreover, the optical system performances such as scan spot size and even scan spot intensity can also be obtained.

Paper Details

Date Published: 20 October 2000
PDF: 7 pages
Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); doi: 10.1117/12.404902
Show Author Affiliations
J.C. Chiou, National Chiao Tung Univ. (Taiwan)
Yu-Chen Lin, National Chiao Tung Univ. (Taiwan)
Yi-Cheng Chang, National Chiao Tung Univ. (Taiwan)


Published in SPIE Proceedings Vol. 4230:
Micromachining and Microfabrication

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