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Proceedings Paper

4x4 MEMS optical cross-connections (OXCs)
Author(s): Ai Qun Liu; Xu Ming Zhang; Yee Loy Lam
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Paper Abstract

This paper reports the design, fabrication and test of a monolithically-integrated 4 X 4 free-space optical crossconnect using microfabricated polysilicon 3D-mirror to enable light-path switching for optical communication applications. The switch consists of 16 pairs of 3D movable mirrors and draw-bridge plate actuators, and four input and output fiber-optic guiding rails. The draw-bridge plates actuated by the electrostatic force drive the 3D-mirrors up and down to cut off the light beam or to let the light beam pass through. The optical crossconnect is fabricated using three-layer-polysilicon surface micromachining technology. The size of the whole structures is 5 mm X 5 mm. The maximum driving voltage is about 45 V, and its resonant frequency is about 5 KHz (200 micrometers switch time). The optical insertion loss of about 1.5 dB and the crosstalk of less than -60 dB have been obtained while using GRIN- lens to collimate the input optical signals.

Paper Details

Date Published: 20 October 2000
PDF: 6 pages
Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); doi: 10.1117/12.404901
Show Author Affiliations
Ai Qun Liu, Nanyang Technological Univ. (Singapore)
Xu Ming Zhang, Nanyang Technological Univ. (Singapore)
Yee Loy Lam, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 4230:
Micromachining and Microfabrication

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