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Proceedings Paper

Frequency tunable micromachined rf oscillators
Author(s): Yee Chong Loke; Kim Miao Liew; Q. Zou; Ai Qun Liu
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Paper Abstract

High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significant factor in affecting the flat passband of the filter and will be further analyzed in this paper.

Paper Details

Date Published: 20 October 2000
PDF: 8 pages
Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); doi: 10.1117/12.404898
Show Author Affiliations
Yee Chong Loke, Nanyang Technological Univ. (Singapore)
Kim Miao Liew, Nanyang Technological Univ. (Singapore)
Q. Zou, Univ. of Hawaii/Manoa (United States)
Ai Qun Liu, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 4230:
Micromachining and Microfabrication

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