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Proceedings Paper

Optimization methodology for low-g microaccelerometer
Author(s): Francis E.H. Tay; Xu Jun; V. J. Logeeswaran
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Paper Abstract

This paper presents a single crystal silicon low-g open loop microaccelerometer designed and fabricated through a spreadsheet optimization methodology. The paper begins with the theoretical formulation and analysis of the differential capacitive accelerometer with full-scale measurement range of +/- 2 g and mg resolution. The `House of Quality' was then used to model and analyze the sensor design variables and device specifications qualitatively. The optimization was implemented using the Excel SolverTM and MATLAB. The effects of electrostatic spring constant on the natural frequency and sensitivity of the accelerometer have been thoroughly discussed. The ratiometric error for this system has been optimized and is well below 2% with a cross axis sensitivity of less than 3%. The operating voltage is 5 V DC. The construction is based on a hybrid two-chip design and the sensing element is wire bonded to a CMOS ASIC.

Paper Details

Date Published: 20 October 2000
PDF: 12 pages
Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); doi: 10.1117/12.404894
Show Author Affiliations
Francis E.H. Tay, National Univ. of Singapore (Singapore)
Xu Jun, National Univ. of Singapore (Singapore)
V. J. Logeeswaran, National Univ. of Singapore (Singapore)


Published in SPIE Proceedings Vol. 4230:
Micromachining and Microfabrication

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