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Proceedings Paper

Optimized layout generator for microgyroscope
Author(s): Francis E.H. Tay; Shifeng Li; V. J. Logeeswaran; David C.K. Ng
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Paper Abstract

This paper presents an optimized out-of-plane microgyroscope layout generator using AutoCAD R14 and MS ExcelTM as a first attempt to automating the design of resonant micro- inertial sensors. The out-of-plane microgyroscope with two degrees of freedom lumped parameter model was chosen as the synthesis topology. Analytical model for the open loop operating has been derived for the gyroscope performance characteristics. Functional performance parameters such as sensitivity are ensured to be satisfied while simultaneously optimizing a design objective such as minimum area. A single algorithm will optimize the microgyroscope dimensions, while simultaneously maximizing or minimizing the objective functions: maximum sensitivity and minimum area. The multi- criteria objective function and optimization methodology was implemented using the Generalized Reduced Gradient algorithm. For data conversion a DXF to GDS converter was used. The optimized theoretical design performance parameters show good agreement with finite element analysis.

Paper Details

Date Published: 20 October 2000
PDF: 9 pages
Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); doi: 10.1117/12.404893
Show Author Affiliations
Francis E.H. Tay, National Univ. of Singapore (Singapore)
Shifeng Li, National Univ. of Singapore (Singapore)
V. J. Logeeswaran, National Univ. of Singapore (Singapore)
David C.K. Ng, Institute of Materials Research and Engineering (Singapore)

Published in SPIE Proceedings Vol. 4230:
Micromachining and Microfabrication
Kevin H. Chau; M. Parameswaran; Francis E.H. Tay, Editor(s)

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