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Proceedings Paper

Linewidth control performance enhancement using novel compensation techniques for DUV scanners
Author(s): James G. Tsacoyeanes; Pradeep K. Govil; J. Christian Swindal; Keith W. Andresen; Javed Sumra
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Paper Details

Date Published: 20 October 2000
PDF: 14 pages
Proc. SPIE 4226, Microlithographic Techniques in Integrated Circuit Fabrication II, (20 October 2000); doi: 10.1117/12.404854
Show Author Affiliations
James G. Tsacoyeanes, Silicon Valley Group, Inc. (United States)
Pradeep K. Govil, Silicon Valley Group, Inc. (United States)
J. Christian Swindal, Silicon Valley Group, Inc. (United States)
Keith W. Andresen, Silicon Valley Group, Inc. (United States)
Javed Sumra, Silicon Valley Group, Inc. (United States)


Published in SPIE Proceedings Vol. 4226:
Microlithographic Techniques in Integrated Circuit Fabrication II
Chris A. Mack; XiaoCong Yuan, Editor(s)

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