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Proceedings Paper

Patternable hybrid sol-gel glass
Author(s): HongJin Jiang; XiaoCong Yuan; Yuen Chuen Chan; Yee Loy Lam
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Paper Abstract

The hybrid sol-gel materials have been extensively studied and widely used in the fabrication of optical devices due to their attractive properties. In this work, the synthesis of the UV sensitive organic- inorganic SiO2/TiO2 sol-gel glass is presented. The effect of the fabrication parameters such as doping concentration, bake temperature and UV light exposure time on the film characteristics (thickness and refractive index) are studied. A simple way of patterning the material by UV light radiation is also introduced. These demonstrate the material possesses high potential application for the micro-optics device fabrication.

Paper Details

Date Published: 20 October 2000
PDF: 6 pages
Proc. SPIE 4226, Microlithographic Techniques in Integrated Circuit Fabrication II, (20 October 2000); doi: 10.1117/12.404848
Show Author Affiliations
HongJin Jiang, Nanyang Technological Univ. (Singapore)
XiaoCong Yuan, Nanyang Technological Univ. (Singapore)
Yuen Chuen Chan, Nanyang Technological Univ. (Singapore)
Yee Loy Lam, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 4226:
Microlithographic Techniques in Integrated Circuit Fabrication II
Chris A. Mack; XiaoCong Yuan, Editor(s)

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