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Proceedings Paper

Fabrication of diffractive micro-optical lens for integration with optoelectronic devices by direct laser writing
Author(s): Chao Wang; Yuen Chuen Chan; Yee Loy Lam; Liping Zhao; Yan Zhou
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Paper Abstract

The optical performances of fabricated diffractive micro-optical lens are determined by some fabrication process parameters. These key fabrication parameters are found to be the laser intensity, the speed of the movable stages, the distance from the top surface of the photoresist to the UV objective lens, the starting laser intensity, the laser intensity variation step and the overlap of the adjacent patterns. In order to get the continuous-relief profile, a method was used to fabricate diffractive optical lens with any surface relief profile. Each zone of the diffractive micro-optical lens is divided and linewidth is achieved by changing the fabrication parameters. A computer control program has been developed to optimize the key fabrication parameters for fabricating the high quality continuous-relief diffractive micro- optical lens matched with design parameters. The fabricated lens has a focal length of 1.1 cm, which is very close to the design value of 1.0 cm.

Paper Details

Date Published: 20 October 2000
PDF: 8 pages
Proc. SPIE 4226, Microlithographic Techniques in Integrated Circuit Fabrication II, (20 October 2000); doi: 10.1117/12.404841
Show Author Affiliations
Chao Wang, Nanyang Technological Univ. (Singapore)
Yuen Chuen Chan, Nanyang Technological Univ. (Singapore)
Yee Loy Lam, Nanyang Technological Univ. (Singapore)
Liping Zhao, Nanyang Technological Univ. (Singapore)
Yan Zhou, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 4226:
Microlithographic Techniques in Integrated Circuit Fabrication II
Chris A. Mack; XiaoCong Yuan, Editor(s)

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