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Proceedings Paper

Protective coatings for Al metallizations obtained by plasma polymerization
Author(s): Jaume Esteve; Francesc Benitez; Salvador Bosch; Elena Martinez; Miquel Galan; Jordi Serrat
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Paper Abstract

Plasma polymerized hexamethyldisiloxane (PP-HMDSO) thin films have been obtained in a DC glow discharge from oxygen/HMDSO gas mixtures. Such films are successfully applied to the pr otection of Al metallisations on plastic substrates. The composition of the films (SiOxCy:H) may be varied from organic (polymer-like) to inorganic (SiO2-like) by varying the oxygen-to-monomer ration in the precursor gas mixture. The structural and functional properties of the films are studied as a function of the plasma parameters.

Paper Details

Date Published: 19 October 2000
PDF: 9 pages
Proc. SPIE 4094, Optical and Infrared Thin Films, (19 October 2000); doi: 10.1117/12.404758
Show Author Affiliations
Jaume Esteve, Univ. de Barcelona (Spain)
Francesc Benitez, Univ. de Barcelona (Spain)
Salvador Bosch, Univ. de Barcelona (Spain)
Elena Martinez, Univ. de Barcelona (Spain)
Miquel Galan, TELSTAR SA (Spain)
Jordi Serrat, TELSTAR SA (Spain)


Published in SPIE Proceedings Vol. 4094:
Optical and Infrared Thin Films
Michael L. Fulton, Editor(s)

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