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Proceedings Paper

Multiwavelength monitoring of thin film growth using a fiber spectrometer
Author(s): Wayne G. Sainty; David W. Sainty
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Paper Abstract

We report here on a novel optical thin film monitoring technique. The instrument has been developed to improve the spectral performance of multilayer stacks by monitoring the instantaneous spectral performance over a wide wavelength band. Use is made of two commercially available miniature fibre spectrometers to cover the band 200 nm to 1 μm. A special software program has been written to read in the data from dual spectrometers and display the data to the monitor. For each layer, the real time data is compared to a calculated spectral performance to assist with the correct film thickness termination. The system stability is assisted by continuous referencing of the lamp emission spectrum. Very complex multilayers can be reliably deposited using the technique.

Paper Details

Date Published: 19 October 2000
PDF: 7 pages
Proc. SPIE 4094, Optical and Infrared Thin Films, (19 October 2000); doi: 10.1117/12.404756
Show Author Affiliations
Wayne G. Sainty, Saintech Pty Ltd. (Australia)
David W. Sainty, Ifix Computer Solutions (Australia)

Published in SPIE Proceedings Vol. 4094:
Optical and Infrared Thin Films
Michael L. Fulton, Editor(s)

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