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Proceedings Paper

Nanometer indicating system based on surface plasma wave
Author(s): Jian Wu; Chunyong Yin; Jihua Guo
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Paper Abstract

A new method for nanometer positioning based on surface plasma wave is reported. A fiber probe approaching a coated prism can be equivalent to a four-layer prism-metal-air- fiber system. Analysis of the near-field beam intensity entering the fiber probe is presented. Theoretical analysis shows that the intensity coupling into the fiber probe changes according to the thickness of air gap. Non-contact nanometer indicating system can be set up according to this characteristic. Experiments show that standard deviation of 2nm and resolution of 0.1nm/nV of positioning repeatability can be achieved under air conditions of +/- 1 degree(s)C/h.

Paper Details

Date Published: 11 October 2000
PDF: 4 pages
Proc. SPIE 4224, Biomedical Photonics and Optoelectronic Imaging, (11 October 2000); doi: 10.1117/12.403919
Show Author Affiliations
Jian Wu, Tsinghua Univ. (China)
Chunyong Yin, Tsinghua Univ. (China)
Jihua Guo, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 4224:
Biomedical Photonics and Optoelectronic Imaging
Hong Liu; Qingming Luo, Editor(s)

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