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Proceedings Paper

Imaging projection lens for excimer laser micromachining
Author(s): Ying Wan; Tiechuan Zuo; Yijian Jiang
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Paper Abstract

In accordance with the practical demand for excimer laser micro- machining technology, an imaging projection lens with a resolution of 2micrometers is designed and produced. Through the practical micro-machining test, the lens achieves the designed specifications and could be put into practical use.

Paper Details

Date Published: 10 October 2000
PDF: 5 pages
Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); doi: 10.1117/12.403910
Show Author Affiliations
Ying Wan, Beijing Polytechnic Univ. (China)
Tiechuan Zuo, Beijing Polytechnic Univ. (China)
Yijian Jiang, Beijing Polytechnic Univ. (China)


Published in SPIE Proceedings Vol. 4222:
Process Control and Inspection for Industry
Shulian Zhang; Wei Gao, Editor(s)

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