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Proceedings Paper

Wide-range and high-resolution displacement measurement with grating
Author(s): Haibao Lu; Juliang Cao; Jianyun Chen
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Paper Abstract

A new method of displacement measurement using single grating is put forward in the paper. Wide range and high-resolution displacement measurement is realized by means of a general coarse metric-grating and a spectroscope. The method solves the traditional problem that high frequency grating can't be manufactured too long. The optical configuration and the principle of measurement are presented in the paper. Its feasibility is proved by experiment. In the experiment, a metric-grating with frequency of 50 rulings/mm is used and optical subdivision more than 32 is received.

Paper Details

Date Published: 10 October 2000
PDF: 4 pages
Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); doi: 10.1117/12.403902
Show Author Affiliations
Haibao Lu, National Univ. of Defense Technology (China)
Juliang Cao, National Univ. of Defense Technology (China)
Jianyun Chen, National Univ. of Defense Technology (China)


Published in SPIE Proceedings Vol. 4222:
Process Control and Inspection for Industry
Shulian Zhang; Wei Gao, Editor(s)

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