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Proceedings Paper

Optical probe using differential confocal technique for surface profile
Author(s): Fusheng Wang; Jiubin Tan; Weiqian Zhao
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Paper Abstract

A non-contact optical probe for surface profiling with up to 2nm position resolution over 100micrometers measurement range has been developed, which includes a confocal light path for non-contact position and a capacitance sensor for Z axis displacement measurement. The principle of the optical probe is based on differential confocal technique. The differential light- intensity distribution depends on the confocal axial response (or depth discrimination) properties. Using the diffraction theory, the mathematical analysis of the method has been performed. Validity of the mathematical theory analysis of the differential confocal technique is experimentally verified.

Paper Details

Date Published: 10 October 2000
PDF: 4 pages
Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); doi: 10.1117/12.403872
Show Author Affiliations
Fusheng Wang, Harbin Institute of Technology (China)
Jiubin Tan, Harbin Institute of Technology (China)
Weiqian Zhao, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 4222:
Process Control and Inspection for Industry
Shulian Zhang; Wei Gao, Editor(s)

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