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Proceedings Paper

Development of research on super-precision measurement techniques for circle and cylindrical contour
Author(s): Jiubin Tan; Weiqian Zhao; Wenguo Yang
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Paper Abstract

At the beginning, it is presented that several theoretical and key technique problems among super-precision and nanometer measurement for circle and cylindrical contour, including: periodic reappearance of straight line datum movement; harmonic suppression in the measurement for circle contour; datum error's recognition and separation in the measurement for cylindrical contour; the problem of information integrality in the measurement for cylindrical contour. Then it is mainly introduced that the development research of super-precision measurement for circle and cylindrical contour, including: error separation technology with non-harmonic suppression; laser monitoring technology of straight line datum movement; error separation technology among datums, etc. Finally, give a vista of new promising measurement technique, such as the contour measurement based on confocal microscopy, optical measuring techniques with non-datums and so on.

Paper Details

Date Published: 10 October 2000
PDF: 6 pages
Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); doi: 10.1117/12.403871
Show Author Affiliations
Jiubin Tan, Harbin Institute of Technology (China)
Weiqian Zhao, Harbin Institute of Technology (China)
Wenguo Yang, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 4222:
Process Control and Inspection for Industry
Shulian Zhang; Wei Gao, Editor(s)

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