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Proceedings Paper

Mapping matrices and weight function in high-precision EST of flatness by optical probe
Author(s): Maisheng Hong; Yuanlei Wei; Zijun Li; Jishun Li
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Paper Abstract

As one of the valid means to perform non-contact high-precision measurements, many types of measuring sensors are developed by professor S. Kyono, which are based on laser optical triangular method and have many compound modes of displacement and angular displacement, such as one-point-one-dimension and one-point-2- dimension, and used in flatness measurement. Based on the uniform equations of 1-dimension and multi-dimension EST (Error Separation Techniques) and their mapping matrixes, which are proposed by the author, this paper expounds the same ultimate source of displacement and angular displacement in spite of their different forms. The above is based on the linear decompositions of flatness measurement equations on two directions of orthogonal coordinates. According to the theory, ten methods of flatness EST are investigated. And their mapping matrixes and weight functions are analyzed. At last their virtues, defects and their application situations are compared.

Paper Details

Date Published: 10 October 2000
PDF: 8 pages
Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); doi: 10.1117/12.403849
Show Author Affiliations
Maisheng Hong, Shanghai Jiao Tong Univ. (China)
Yuanlei Wei, Shanghai Jiao Tong Univ. (China)
Zijun Li, Shanghai Jiao Tong Univ. (China)
Jishun Li, Luoyang Institute of Technology (China)

Published in SPIE Proceedings Vol. 4222:
Process Control and Inspection for Industry
Shulian Zhang; Wei Gao, Editor(s)

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