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Proceedings Paper

Optoelectronic inspection method for IC shell blanks
Author(s): Changku Sun; Hongyan Shi; Xiaojie Xue; Shenghua Ye
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Paper Abstract

This paper propounds an optoelectronic self-study inspection method for IC' shell blanks on the basis of comparison with standardized workpieces. First, the inspection system self- studies. Second, the system automatically inspects the products, and those exceeding the acceptance tolerance will be singled out as the unqualified. By comparing the inspected workpieces with the standard ones the system can identify defects such as shutdown and cutting-out. This method is of high inspection speed, powerful anti-interference ability, and high flexibility in term of shape variety.

Paper Details

Date Published: 10 October 2000
PDF: 4 pages
Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); doi: 10.1117/12.403843
Show Author Affiliations
Changku Sun, Tianjin Univ. (China)
Hongyan Shi, Tianjin Univ. (China)
Xiaojie Xue, Tianjin Univ. (China)
Shenghua Ye, Tianjin Univ. (China)

Published in SPIE Proceedings Vol. 4222:
Process Control and Inspection for Industry
Shulian Zhang; Wei Gao, Editor(s)

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