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Proceedings Paper

LIGA technology today and its industrial applications
Author(s): Song-Jo Chung; Herbert Hein; Juergen Mohr; Franz Josef Pantenburg; Joachim Schulz; Ulrike Wallrabe
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Paper Abstract

Microcomponents can be manufactured not only by silicon technologies, bu talso by many other technologies, e.g. precision engineering, laser ablation, microelectrodischarge, RIE and by the LIGA process. In this paper, the state of the art of the LIGA technology and its industrial applications are presented, which have been developed in recent years at the Forschungszentrum Karlsruhe. Related technologies are described as well. This includes the use of a sacrificial layer and an alternative process technology for the fabrication of mold inserts using conventional UV-lithography with the negative resist SU-8. With respect to applications of the LIGA technology, a brief introduction to their specific fabrication processes and their functionality is presented. These are microspectrometers, optical fiber connectors, cycloid gear systems, optical heterodyne receivers and micro-mechanical gyroscopes.

Paper Details

Date Published: 11 October 2000
PDF: 12 pages
Proc. SPIE 4194, Microrobotics and Microassembly II, (11 October 2000); doi: 10.1117/12.403702
Show Author Affiliations
Song-Jo Chung, Forschungszentrum Karlsruhe GmbH (Germany)
Herbert Hein, Forschungszentrum Karlsruhe GmbH (Germany)
Juergen Mohr, Forschungszentrum Karlsruhe GmbH (Germany)
Franz Josef Pantenburg, Forschungszentrum Karlsruhe GmbH (United States)
Joachim Schulz, Forschungszentrum Karlsruhe GmbH (Germany)
Ulrike Wallrabe, Forschungszentrum Karlsruhe GmbH (Germany)

Published in SPIE Proceedings Vol. 4194:
Microrobotics and Microassembly II
Bradley J. Nelson; Jean-Marc Breguet, Editor(s)

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