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Proceedings Paper

Calibration of frequency response function for a phase-shifted interferometer
Author(s): Zhishan Gao; Jinbang Chen
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Paper Abstract

There is very strong need to test mid-frequency power spectrum density (PSD) for optical surface used in high power laser system, aerospace high resolution camera, astronomy optical system, and X-ray optics, etc. To improve measurement accuracy and remove the error, the calibration of frequency response function for a phase-shifted interferometer must be done before PSD is tested by this interferometer. In this paper, the intensity function contributed by three plane-waves interference is given at first. On basis of this function, the sinusoidal phase grating with variable frequency formed by two plane-waves interference with appropriate ratio of two amplitudes is discussed and is used to calibrate the frequency response function of an interferometer. A test example is given and some error sources are pointed out and studied.

Paper Details

Date Published: 6 October 2000
PDF: 5 pages
Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); doi: 10.1117/12.402837
Show Author Affiliations
Zhishan Gao, Nanjing Univ. of Science and Technology (China)
Jinbang Chen, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 4231:
Advanced Optical Manufacturing and Testing Technology 2000
Li Yang; Harvey M. Pollicove; Qiming Xin; James C. Wyant, Editor(s)

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