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Proceedings Paper

Processing technique for interference pattern with step using phase-shift interferometry
Author(s): Aiming Ge; Lei Chen; Jinbang Chen; Rihong Zhu
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Paper Abstract

Based on introducing the principle and method of processing technique for interference pattern with step using the characteristic of phase-shift interferometry. The paper has discussed a new phase-unwrapping algorithm for the phase map containing discontinuities. The correct phase values in the presence of discontinuities, especially those caused by the object with height steps, can be obtained. This algorithm is fast and accurate. The results of the measurement of three- dimensional object with height steps are presented. These techniques have been successfully applied to measure the surface and wave aberration of the system with step.

Paper Details

Date Published: 6 October 2000
PDF: 4 pages
Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); doi: 10.1117/12.402831
Show Author Affiliations
Aiming Ge, Nanjing Univ. of Science and Technology (China)
Lei Chen, Nanjing Univ. of Science and Technology (China)
Jinbang Chen, Nanjing Univ. of Science and Technology (China)
Rihong Zhu, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 4231:
Advanced Optical Manufacturing and Testing Technology 2000
Li Yang; Harvey M. Pollicove; Qiming Xin; James C. Wyant, Editor(s)

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