Share Email Print

Proceedings Paper

High-accuracy absolute flatness testing using a commercial interferometer
Author(s): Sen Han; Erik Novak
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In absolute interferometric flatness testing, various flats are measured in multiple configurations to approximately solve for the surface figure of each flat independent of the reference flat used. This measurement sequence generally involves rotation of one flat as well as removal and replacement with different flats. The deviation between the rotation center of the flat and the coordinate center of the software system used causes measurement errors, as do any errors in replacement location and general error sources associated with interferometry. In this paper techniques are described to optimize the accuracy of the three-flat absolute flat testing technique, and the various sources of measurement error are analyzed. Use of crosshairs for positioning and rotation adjustment as well as general methods to improve interferometric testing are described. Results from the high- accuracy absolute flat testing are compared with standard absolute flat results to evaluate how to achieve improved measurement results.

Paper Details

Date Published: 6 October 2000
PDF: 6 pages
Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); doi: 10.1117/12.402815
Show Author Affiliations
Sen Han, Veeco Instruments Inc. (United States)
Erik Novak, Veeco Instruments Inc. (United States)

Published in SPIE Proceedings Vol. 4231:
Advanced Optical Manufacturing and Testing Technology 2000
Li Yang; Harvey M. Pollicove; Qiming Xin; James C. Wyant, Editor(s)

© SPIE. Terms of Use
Back to Top