Share Email Print
cover

Proceedings Paper

Optimizing parameters for computer-controlled polishing precision planar mirror
Author(s): Qiao Xu; Jinm Wang; Jie Yu; Fuxing Yang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A quantitative expression for mid-spatial frequency error of the large planar mirror fabricated by computer controlled polishing is employed in terms of wavefront's power spectral density (PSD). The PSD information is calculated from wavefront measured by large phase shifted interferometer. The optimized process parameters are investigated to reduce the mid-spatial frequency error with adequate efficiency to meet the conventional requirements such as P-V and RMS wavefront errors. Based on the criteria of efficiency and PSD, the optimized parameters have been obtained for fabricating precision planar mirror. As an application, a 270 mm x 270 mm x 30 mm mirror has been finished after 10 polishing hours. The P-V value of the reflective wavefront is 0.19 λ (λ= 0.6328μm), and the PSD distribution has also met the requirements.

Paper Details

Date Published: 6 October 2000
PDF: 5 pages
Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); doi: 10.1117/12.402791
Show Author Affiliations
Qiao Xu, Chengdu Fine Optical Engineering Research Ctr. (China)
Jinm Wang, Chengdu Fine Optical Engineering Research Ctr. (China)
Jie Yu, Chengdu Fine Optical Engineering Research Ctr. (China)
Fuxing Yang, Chengdu Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 4231:
Advanced Optical Manufacturing and Testing Technology 2000
Li Yang; Harvey M. Pollicove; Qiming Xin; James C. Wyant, Editor(s)

© SPIE. Terms of Use
Back to Top