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Proceedings Paper

Novel profilometer with dual digital length gauge for large aspheric measurements
Author(s): Quandou Wang; Zhongyu Zhang; Xuejun Zhang; Jingchi Yu
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Paper Abstract

Three-dimensional or x-y-z profilometer is a well-established method for measuring non-symmetric aspherical surface. In this paper, the design of three-dimensional, x-θ -z profilometer called dual gauge profilometer (DGP), which uses a granite straight edge with high precision linearity as reference to reduce the linearity error of ball slide, is presented. The benefits of using this reference structure, data processing and error surface reconstruction are also discussed. Through the use of the novel profilometer, a non- symmetric off-axis mirror with 600 millimeter in diameter can be measured with accuracy of 4 microns Peak to Valley (PV) within 40 minutes, including data processing time.

Paper Details

Date Published: 6 October 2000
PDF: 8 pages
Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); doi: 10.1117/12.402789
Show Author Affiliations
Quandou Wang, Changchun Institute of Optics and Fine Mechanics (China)
Zhongyu Zhang, Changchun Institute of Optics and Fine Mechanics (China)
Xuejun Zhang, Changchun Institute of Optics and Fine Mechanics (China)
Jingchi Yu, Soochow Univ. (China)


Published in SPIE Proceedings Vol. 4231:
Advanced Optical Manufacturing and Testing Technology 2000
Li Yang; Harvey M. Pollicove; Qiming Xin; James C. Wyant, Editor(s)

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